Control of Industrial Processes
Session Slot: T-Tu-M11
Area Code: 7a
|
Paper Title | Authors | | |
Identification and Control of an Industrial Polymerisation Process | Geoffrey Mourue, Pierre Descamps, Denis Dochain and Vincent Wertz | | |
Multi-Loop Controllers Using Wavelet Packet Decomposition for Film Processes | Yoshihiro Hashimoto, Koji Urase, Toshiaki Itoh, Takashi Hamaguchi, Yoshitaka Togari, Haruhiko Maki and Norikazu Yasutomo | | |
Processing of Semiconductor Quartz Photomarks on Bake-Plates | Weng Khuen HO, Arthur TAY and Khiang Wee LIM | | |
On Control of Resist Film Uniformity in the Microlithography Process | Ho Weng Khuen, Lee Lay Lay, Charles Schaper | | |
A Hybrid Automaton Representation of Simulated Moving Bed Processes | Tobias Kleinert, Jan Lunze | | |
Neural Network-based Identification and MPC control of SMB Chromatography | Chaoyong Wang, Sebastian Engell, Felix Hanisch | | |