Design, Fabrication, and Control of a High-aspect Ratio
| Authors: | Horowitz Roberto, University of California, United States
Oldham Kenn, University of California, United States
Huang Xinghui, University of California, United States
Chahwan Alain, University of California, United States |
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| Topic: | 4.2 Mechatronic Systems |
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| Session: | Mechatronics for Data Storage Devices II |
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| Keywords: | Microsystems, Disk memory, Multirate control, Actuators, Vibration |
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Abstract
At bit densities now approaching 1 terabit per square inch,positioning the read-write head in a hard disk drive over data bits will requirenovel servo configurations and controllers. This paper presents aMEMS microactuator for installation in a dual-stage servo system fora hard disk drive and controller designs that utilize themicroactuator to suppress vibration of the servo arm. Themicroactuator uses high-aspect ratio etching and deep trenchisolation to generate high force densities and good mechanicalrobustness. The microactuator is installed in a hard disk drive andwill be used to evaluate controllers designed to suppressairflow-induced vibration. Simulated and experimental results usingPQ design methodology are presented.
