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European Congress of Chemical Engineering - 6
Copenhagen 16-21 September 2007

Abstract 2192 - Material effects on the ammonothermal crystallization of bulk GaN

Material effects on the ammonothermal crystallization of bulk GaN

Advancing the chemical engineering fundamentals

Crystallization (T2-9P)

Ing Nicolas Alt
University of Erlangen-Nuremberg
iPAT, Dpt. for Process Technology and Machinery
Cauerstrasse 4
91058 Erlangen
Germany

Dr Elke Meissner
Fraunhofer Institute Integrated Systems and Device Technology
Crystal Growth Laboratory
Schottkystrasse 10
91058 Erlangen
Germany

Mr Daniel Kilian
University of Erlangen-Nuremberg
iPAT, Dpt. for Process Technology and Machinery
Cauerstrasse 4
91058 Erlangen
Germany

Prof Eberhard Schlücker
University of Erlangen-Nuremberg
iPAT, Dpt. for Process Technology and Machinery
Cauerstrasse 4
91058 Erlangen
Germany

Keywords: GaN, gallium nitride, ammonothermal, bulk crystal growth, supercritical ammonia

Gallium nitride is an essential material for the semiconductor industry, e.g. for laser diodes. Up to now single crystals can not be grown in an adequate size and quality for industrial scale production. A promising method for growing such bulk crystals is the ammonothermal process. Due to the extreme reaction conditions at high pressure and temperature in a supercritical ammonia atmosphere, the requirements of the materials are extensive. Especially chemical resistance behaviour of the materials used is important to prevent contaminations in the grown crystals. For this reason different metals and ceramics were investigated for applicability in the ammonothermal process. Catalytic effects on crystal growth, contamination of the crystals, and chemical behaviour of these materials were examined by microscopy, SEM, and EDX measurements. Evaluation of these results allows the improvement of crystallizers and consequently the quality of the produced crystals.

Presented Wednesday 19, 13:30 to 15:00, in session Crystallization (T2-9P).

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