Session code: | Tu-E06-TO |
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Date: | 2005-07-05 |
Time: | 16:30:00 - 18:30:00 |
Room: | Small Theatre |
Organizers: | Adomaitis Raymond, University of Maryland, United States |
Chairs: | Christofides Panagiotis, UCLA, United States |
Cochairs: | Adomaitis Raymond, University of Maryland, United States |
Paper Code | Title | Authors | Topic |
---|---|---|---|
Tu-E06-TO/1 | Control of Film Uniformity Properties in a Planetary Radial-Flow Gallium Nitride CVD System | Adomaitis Raymond, Parikh Rinku P. | 6.1 |
Tu-E06-TO/2 | Optimal operation of thin film growth with multiscale process objectives | Varshney Amit, Armaou Antonios | 6.1 |
Tu-E06-TO/3 | More Process System Engineering (PSE) Applications in Integrated Circuit (IC) Manufacturing | Lewin Daniel, Lachman-Shalem Sivan, Grosman Benyamin | 6.1 |
Tu-E06-TO/4 | Multiscale Modeling of HVOF Thermal Spray Process | Christofides Panagiotis, Li Mingheng | 6.1 |
Tu-E06-TO/5 | POD based model approximation for an industrial glass feeder | Weiland Siep, Astrid Patricia | 6.1 |
Tu-E06-TO/6 | Electroless Nickel Plating: Bath Control | Kantola Kalle, Tenno Robert, Koivo Heikki | 6.1 |