| Session code: | Tu-E06-TO |
|---|---|
| Date: | 2005-07-05 |
| Time: | 16:30:00 - 18:30:00 |
| Room: | Small Theatre |
| Organizers: | Adomaitis Raymond, University of Maryland, United States |
| Chairs: | Christofides Panagiotis, UCLA, United States |
| Cochairs: | Adomaitis Raymond, University of Maryland, United States |
| Paper Code | Title | Authors | Topic |
|---|---|---|---|
| Tu-E06-TO/1 | Control of Film Uniformity Properties in a Planetary Radial-Flow Gallium Nitride CVD System | Adomaitis Raymond, Parikh Rinku P. | 6.1 |
| Tu-E06-TO/2 | Optimal operation of thin film growth with multiscale process objectives | Varshney Amit, Armaou Antonios | 6.1 |
| Tu-E06-TO/3 | More Process System Engineering (PSE) Applications in Integrated Circuit (IC) Manufacturing | Lewin Daniel, Lachman-Shalem Sivan, Grosman Benyamin | 6.1 |
| Tu-E06-TO/4 | Multiscale Modeling of HVOF Thermal Spray Process | Christofides Panagiotis, Li Mingheng | 6.1 |
| Tu-E06-TO/5 | POD based model approximation for an industrial glass feeder | Weiland Siep, Astrid Patricia | 6.1 |
| Tu-E06-TO/6 | Electroless Nickel Plating: Bath Control | Kantola Kalle, Tenno Robert, Koivo Heikki | 6.1 |