Dynamic Modelling of a Nanomanipulator Chain
| Authors: | Jez Ondrej, Brno University of Technology, FEEC, Czech Republic
Voda-Besancon Alina, ENSIEG INPG, France
Marliere Sylvain, ICA INPG, France
Besancon Gildas, ENSIEG INPG, France |
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| Topic: | 4.1 Components and Instruments |
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| Session: | Flexible Control Instrumentation |
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| Keywords: | nanosystems, instrumentation, force and position control, modelling, force feedback |
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Abstract
This paper presents a dynamic system modelling approach of ananomanipulator chain developed by the ICA-ACROE and LEPESlaboratories. The chain is a very complex instrument, serving forprecise sensing and manipulation in nanometer scale environment. The objective is to find a suitable model of thechain in view of stability and performances analysis, and forfurther control design of the feedback loops. Such a global modelis here developed using state space representation of thedifferent parts of the chain. Moreover, an experimental modellingand identification of the cantilever parameters are presented. Thenano-scale tip-sample interaction forces are modelled too. Finallythe simulation of the whole nanomanipulation chain is performed,simulating the approach-withdrawal operation which is in goodaccordance with the real patterns of experiments in physics.
