Integral Sliding-Mode Control of a Piezoelectric Actuated Motion Stage
| Authors: | Shen Jing-Chung, National Formorsa University, Taiwan
Jywe Wen-Yuh, National Formorsa University, Taiwan
Liu Chien-Hung, National Formorsa University, Taiwan
Jian Yu-Te, National Formorsa University, Taiwan
Deng Yun-Feng, National Formorsa University, Taiwan |
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| Topic: | 4.2 Mechatronic Systems |
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| Session: | Data Storage Devices and Micro-Actuation |
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| Keywords: | Sliding-mode control, Hysteresis, Actuator, Precision, Nonlinear. |
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Abstract
This paper presents the design of an integral sliding-mode controller for piezoelectric actuated system. The sliding-mode disturbance (uncertainty) estimation and compensation scheme is used. The nonlinear piezoelectric actuated system is modeled as a first order linear model coupled with a hysteresis. When the model is identified, the hysteresis nonlinearity is linearized then the linear system model with uncertainty is used to design the sliding-mode controller. The structure of the proposed controller is as simple as the PID controller. Thus, it can be implemented easily. This design method is applied to the motion control of a nano-stage and experimental results are presented.
