Electronics and Photonics |
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Session 183 - Topics in Plasma Science and Thin Film Applications III - in Honor of Herbert H. Sawin | |||
Topics In Plasma Science and Thin Film Applications III - In Honor of Herbert H. Sawin | |||
Chair: | Jane P. Chang | ||
CoChair: | Sumit Agarwal | ||
183a | Plasma Etching for Metal Gate Electrode Fabrication in Conventional and Sub-Threshold Transistor Integration Steven A. Vitale, Jakub Kedzierski, Nisha ChEcka, Craig L. Keast |
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183b | Interface Preparation for High Mobility Substrates Anthony J. Muscat |
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183c | Applying Lessons Learned from An Etching Lab: The Role of O Atoms In PECVD Colin A. Wolden |
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183d | Polymer Nano-Texturing and Stochastic Nano-Patterning Using Plasma Processing Evangelos Gogolides, Angeliki Tserepi, Nikos Vourdas, Maria Elena Vlachopoulou, Katerina Tsougeni, Dimitrios Kontziampasis |
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183e | CMP Pad Surface Analysis and the Components of Pad Surface Texture Andrew S. Lawing |
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