The study presents results about nanocluster titania thin films and their catalytic application in the photo-induced deposition of metallic copper. Self-assembly of the titania layers on glass substrates was carried out via selective hydroxyl condensation reaction between titanium butoxide and octadecyl trimethoxysilane adsorbed on the hydrophilic surface of glass. Metallic copper formed after the titania-composited substrate wetted with aqueous solution of methanol and copper acetate was subjected into ultraviolet light illumination. Our FESEM observations revealed the deposited Cu film on the titania layer composed of 15-50 nm particles, and the shape of the metal precipitate was found to be dependent upon the amount of cupric ions in solution and the structure of titania films.