David B. Asay, Pennsylvania State University, 123 Fenske Lab, University Park, PA 16802 and Seong H. Kim, Chemical Engineering, Pennsylvania State University, 123 Fenske Lab, University Park, PA 16802.
Adhesion, friction, and wear in MicroElectroMechanical System (MEMS) devices are key challenges limiting MEMS technology. Typically made of polycrystalline silicon, these devices need a self-healing or replenishing lubricant layer to prevent wear, reduce adhesion, and minimize friction. The adsorption isotherm of gas-phase alcohol lubricant molecules provides the formation of molecular-thick films on silicon oxide surfaces. The presence of these films on silicon surfaces lowers both the adhesive and frictional response between native silicon oxide nano-asperity contacts. Tribological properties of alcohol vapor films are investigated as a function of chain length (C2 – C5) on silicon contacts. Surface chemistry pertinent to this system is discussed.