Systems and Process Control | |||
Session 92 - Process Monitoring and Fault Detection I | |||
Developments in process monitoring and fault detection. | |||
Chair: | S. Joe Qin | ||
CoChair: | Leo H. Chiang | ||
CoSponsor(s): | Computers in Operations and Information Processing | ||
92a | Process Trend Monitoring Based on Key Sensitive Index: Applications Semiconductor Manufacturing Jyh-Cheng Jeng, An-Jhih Su, Hsiao-Ping Huang, Cheng-Ching Yu | ||
92b | Statistical Fault Detection of Batch Processes in Semiconductor Manufacturing Qinghua (Peter) He, Jin Wang | ||
92c | Real-Time Thin Film Characterization during Chemical Vapor Deposition Using Moving Horizon Estimation Rentian Xiong, Martha Gallivan | ||
92d | Industrial Implementation of on-Line Multivariate Quality Control (Part II: Long-Term Performance, Model Maintenance, and Model Leveraging) Leo H. Chiang, Lloyd Colegrove | ||
92e | Evolving Models and a Pls Similarity Factor for Monitoring Batch Processes Jon C. Gunther, Dale E. Seborg | ||
92f | Bio-Reactor Monitoring with Multiway-Pca and Model Based-Pca Yang Zhang, Thomas F. Edgar | ||
92g | Variance Component Analysis Based Fault Diagnosis of Multi-Layer Overlay Lithography Processes Jie Yu, S. Joe Qin |
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