Applied Mathematics and Numerical Analysis | |||
Session 698 - Simulation and Control of Electronic Materials Manufacturing Processes | |||
The session introduces novel simulation and control techniques applied to electronic materials manufacturing processes. | |||
Chair: | Andrew Salinger | ||
CoChair: | Ray Adomaitis | ||
CoSponsor(s): | Electronics and Photonics | ||
698a | On State Estimation in the Low-Volume High-MIX Semiconductor Manufacturing Using a Singular Gauss-Markov Model Jin Wang, Qinghua (Peter) He | ||
698b | Modeling and Control of the Gradient Freeze Method of Crystal Growth Lisa Lun, Andrew Yeckel, Prodromos Daoutidis, Jeffrey J. Derby | ||
698c | Combining a Legacy Cfd Code with an Evolutionary Algorithm to Perform Optimization Analysis of Chemical Vapor Deposition Systems Theodora C. Xenidou, Andreas G. Boudouvis, Nicolas C. Markatos | ||
698d | System Identification and Model Predictive Control of Microstructure during Thin-Film Growth Amit Varshney, Antonios Armaou | ||
698e | Building Non-Parametric Models for Rsm: a Bayesian Approach and Its Application to Plasma Etching Nirmal Tatavalli Mittadar, Michael Nikolaou, Demetre J. Economou | ||
698f | Effects of Temperature and Structural Defects on the Theoretical Strength of Hadrian Djohari, Frederick Milstein, Dimitrios Maroudas |
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