Applied Mathematics and Numerical Analysis | |||
| Session 698 - Simulation and Control of Electronic Materials Manufacturing Processes | |||
| The session introduces novel simulation and control techniques applied to electronic materials manufacturing processes. | |||
| Chair: | Andrew Salinger | ||
| CoChair: | Ray Adomaitis | ||
| CoSponsor(s): | Electronics and Photonics | ||
| 698a | On State Estimation in the Low-Volume High-MIX Semiconductor Manufacturing Using a Singular Gauss-Markov Model Jin Wang, Qinghua (Peter) He | ||
| 698b | Modeling and Control of the Gradient Freeze Method of Crystal Growth Lisa Lun, Andrew Yeckel, Prodromos Daoutidis, Jeffrey J. Derby | ||
| 698c | Combining a Legacy Cfd Code with an Evolutionary Algorithm to Perform Optimization Analysis of Chemical Vapor Deposition Systems Theodora C. Xenidou, Andreas G. Boudouvis, Nicolas C. Markatos | ||
| 698d | System Identification and Model Predictive Control of Microstructure during Thin-Film Growth Amit Varshney, Antonios Armaou | ||
| 698e | Building Non-Parametric Models for Rsm: a Bayesian Approach and Its Application to Plasma Etching Nirmal Tatavalli Mittadar, Michael Nikolaou, Demetre J. Economou | ||
| 698f | Effects of Temperature and Structural Defects on the Theoretical Strength of Hadrian Djohari, Frederick Milstein, Dimitrios Maroudas | ||
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